Integrated Readout and Control Electronics for a Microelectromechanical Angular Velocity Sensor

An ASIC is implemented for readout and control of a bulk micromachined capacitive gyroscope. Both the system architecture and details on the circuitry of different subsystems are presented. Together with digital signal processing on an FPGA chip, a complete working prototype of a microelectromechanical gyroscope is realized and measured. This plusmn100 deg/s gyroscope achieves 0.053 deg/s/yradic(Hz) spot noise and 49.9 dB signal-to-noise ratio over the 36 Hz bandwidth, with plusmn4 % offset stability over the temperature range from -40 to +85 degC. The work shows that a gyroscope can be realized with the chosen architecture, and that good performance can be achieved