Experimental study on the o/sub 2/ influences on semiconductor gas sensor responses

This paper studies the influence of environmental O
₂
on the semiconductor gas sensor responses experimentally. Both the commercial thick film gas sensors and the lab fabricated micro-hotplate based thin film gas sensors are studied. With the experiments and analysis, all the sensors could be influenced by the environmental O
₂
concentration variation. Comparing with their sensitivity to the detected gases (CO or CH
₄
), the thick film sensors show independent on the O
₂
influence when detecting CH
₄
, while the influences of O
₂
on thick film sensors to CO are large and the influences on thin film sensors are large too, whatever the CO or CH
₄
gas