Laser frequency trimming technology based on FBAR

Thin film bulk acoustic resonators (FBAR) can be integrated in RFIC as an excellent RF and MF filter. Aimed at high frequency precision FBAR, a new method of evaporating the electrode layer of FBAR by laser is provided to trim FBAR resonant frequency. The experiment results confirm the feasibility of this method and show with a trimming precision up to 0.06%. Obvious frequency float was not detected. This laser trimming method for FBAR was not reported till now