High Output Saturation and High-Linearity Uni-Traveling-Carrier Waveguide Photodiodes

Waveguide uni-traveling-carrier photodiodes (UTC-PDs) have been fabricated and tested. Output saturation currents greater than 40 mA at 1 GHz are demonstrated for a 10 mumtimes150mum photodiode (PD). The third-order intermodulation distortion is also measured and exhibits a third-order output intercept point of 43 dBm at 20 mA and 34 dBm at 40 mA for this same PD. UTC-PDs with geometries of 5 mumtimes100 mum and 10 mumtimes100 mum are also compared and it is shown that a wider waveguide PD has improved saturation characteristics due to the lower optical power density which reduces the saturation at the front end of the device