Monolithic integration of an X-band circulator with GaAs MMICs

Monolithic integration of circulators with GaAs MMICs offers the potential of lower cost, reduced size and improved uniformity over the present hybrid approaches. Development of MMIC compatible ferrite film deposition techniques, device design and fabrication are described. Results on ferrite film circulators deposited on Si and GaAs substrates are presented and integration with FETs discussed.<
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