Calibration Standards Verification Procedure Using the Calibration Comparison Technique

This article examines the verification procedure of coplanar calibration standards based on the calibration comparison technique. For the first time, different commercially available alumina calibration substrates were compared using the NIST multiline TRL calibration procedure, calibration comparison approach, and the NIST GaAs CPW calibration reference material RM8130. The characteristic impedance of the verified calibration line standards is extracted using the multiline TRL procedure and the definition of the load standard resistance. The error circuit, describing difference of the substrate medium and the standard design is extracted. Finally, the worst case error bounds for the measurement of passive devices compared to the reference multiline TRL on the RM8130 are calculated for each tested substrate