Nitride-Based Light Emitting Diodes With Textured Sidewalls and Pillar Waveguides

Nitride-based light emitting diodes (LEDs) with sidewall texture and pillar waveguides (STPW) were fabricated using conventional lithography method. With 20-mA injection current, it was found that forward voltages were 3.16 and 3.15 V for the conventional LED and the LED with STPW, respectively. It was also found that 20-mA LED output powers were 8.4 and 10.1 mW for conventional LED and the LED with STPW, respectively. The enhancement is attributed to the out-coupling of lateral waveguide mode in the near horizontal directions