Optimizing pulsed OBIC technique for ESD defect localization

The evolution of laser sources has led to the advent of new laser-based techniques for failure analysis. The pulsed OBIC (optical beam induced current) technique is one of them, which is based on the photoelectric laser stimulation of the device under test (DUT) at a micrometric scale. The suitability of this technique to localize failure sites resulting from electrostatic discharges (ESD) has previously been demonstrated. This paper presents a complementary work on the OBIC experimental procedure for defect localization improving the sensitivity of this technique and thus the probability to localize very small size defects