Full two-port on-wafer vector network analysis to 120 GHz using active probes

A millimeter-wave full two-port on-wafer vector network analyzer (VNA) is implemented with monolithic GaAs directional time-domain reflectometer integrated circuits mounted directly on low-loss microwave wafer probes. The VNA performs S-parameter measurements to 120 GHz with +or- 0.2 dB repeatability using a line-reflect-match calibration method.<
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