A superconductive integrated circuit foundry

A foundry has been established for production of superconductive integrated circuits, modeled after semiconductor application-specific integrated circuit (IC) production. The foundry supports and improves standardized Nb-based IC processing, and develops advanced processes such as a novel NbN-based process. The authors discuss the operation of the foundry, standardized process technologies, design rules, process flows, in-line product tracking, statistical process control, and automated parametric testing. The advantages of fine-line lithography and a class 10/100 environment are presented. Internal and external customer support with standard layout and circuit design tools enables reliable, quick turnaround production of a wide range of circuits. Finally, the authors present examples of concurrent device and process development towards improved, denser circuits, while maintaining a disciplined foundry environment.<
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