Cavity-backed MEMS patch antennas on double-layer silicon wafers

This paper presents cavity-backed patch antennas on a double-layer silicon wafer. The developed antenna has flexibility for obtaining the desired equivalent dielectric constant under the limit of the wafer thickness, because a depth of cavity on each wafer can be adjusted with each other. The wide band characteristic of this antenna has been shown by simulation, and the experimental results at millimeter wave have also been presented