Investigating the impact of carbon contamination on RF MEMS reliability

Radio frequency microelectromechanical systems (RF MEMS) are advantageous for reconfigurable antennas providing the potential for steering, frequency agility, and tunable directivity. Until RF MEMS switches can consistently reach cycles into the billions (if not trillions), limited reliability outweighs the promised benefits, preventing the deployment of RF MEMS into systems. Understanding failure mechanisms is essential to improving reliability. This paper describes preliminary reliability results and tests conducted in a vacuum chamber to investigate and understand the impact of contamination related failure mechanisms.