Dual-Axes Confocal Fluorescence Microscopy with a Two-Dimensional MEMS Scanner

This paper presents a dual-axes confocal fluorescence imaging system based on a two-dimensional (2-D) microelectromechanical systems (MEMS) scanner. The gimbaled scanner is fabricated on a double silicon-on-insulator (SOI) wafer and is actuated by self-aligned, vertical, electrostatic comb actuators. The device is aluminum coated by blanket evaporation to increase efficiency. Fluorescence imaging is successfully demonstrated by a table-top microscope system. Images with a field of view (FOV) of 211 mumtimes210 mum are acquired at 8 frames per second. The transverse resolution is 5.63 mum and 6.92 mum for the vertical and horizontal dimensions, respectively