Increasing Microprocessor Speed by Massive Application of On-Die High-K MIM Decoupling Capacitors

A 90nm SOI microprocessor with massive application of high-k MIM decoupling capacitor modules is proven to increase the maximum frequency of the processor by close to 10%. Simulations predict reduced power supply noise leading to improvements in Fmax by close to the equivalent of a transistor node increase. Simulations of applying MIM decoupling capacitors to high-speed I/O and PLL circuits show that they can further enhance performance and area requirements for these critical circuits in advanced technologies