Thermal Mapping of Power Devices with a Completely Automated Thermoreflectance Measurement System

Aim of this paper is to present a system for a completely automated thermal mapping acquisition on the surface of power ICs and devices. This system is based on a single point sensor which measures the variation of the reflection coefficient due to a temperature change in metals and semiconductors. The main features of such sensor are the improved spatial resolution and bandwidth with respect to the classical infrared acquisition systems