An analytical approach to parameter extraction for on-chip spiral inductors with double-/spl pi/ equivalent circuit

In this paper, we present an analytical approach to parameter extraction based on S-parameter measurement for on-chip spiral inductors with double-/spl pi/ equivalent circuit. The extraction is carried out using a set of characteristic functions derived from the equivalent circuit without iterative optimization. As verified by a series of inductors fabricated with a 0.18 /spl mu/m CMOS process, a good agreement between the measured and simulated data over a wide frequency range has been obtained.