Silicon full integrated LNA, filter and antenna system beyond 40 GHz for MMW wireless communication links in advanced CMOS technologies

Today, SiGe HBT and MOSFET cut-off frequencies are higher than 230 GHz (Chevalier et al., 2004) and this increase allows new millimeter wave (MMW) applications on silicon such as 60 GHz WLAN and 77 GHz automotive radar. This study focuses on a wireless communication block with the antenna integration. Functions such as amplifier and filter have been used to perform this block. This is a demonstration of individual component integration and co-integration with antenna/LNA matching. Antenna achieved on advanced sub 120nm HCMOS high resistivity silicon on insulator (HR SOI) (p >1 kOhms.cm) has been designed and integrated. A low noise amplifier (LNA) and a filter have been retained for this first chain. Antenna and block characterizations are led on a dedicated on-wafer test bench. Antenna performances in term of gain and radiation pattern are given. A communication link has been then established between a single antenna (-2 dB gain) and the full communication block with a -19 dB transmission gain at 40 GHz