A solenoid-type inductor with Fe-based soft magnetic thin film for high frequency application

Soft FeSiBCuNbCr magnetic thin film was deposited by magnetron sputtering as magnetic core for inductor. In the fabrication process, UV-LIGA, dry etching technique, fine polishing and electroplating technique are adopted. The size of the solenoid-type inductor is 3.9 mm times 2.66 mm. Experimental results show that the inductance keeps constant about 0.9 muH in the frequency range from 1 MHz to 10 MHz, and the maximum quality factor is 2.5 at 9 MHz