Pyrolyzed Polymer as Absorbent of Nitrogen Dioxide Sensor

This paper deals with a pyrolyzed polymer as a kind of carbon materials obtained by pyrolysis of polymers. Through the combination of micromachining of polymers and following pyrolysis process, we can obtain pyrolyzed polymer MEMS structures for various applications. This work focuses on pyrolyzed polymer as an absorbent of nitrogen dioxide sensor. The resistance of the developed sensor was dramatically decreased when the sensor was exposed to the NO
2
mixture gas. Through evaluations of dependence on pyrolysis temperature and operating temperature, it is found that higher pyrolysis temperature and higher operating temperature contribute to higher sensitivity against gas mixture of NO
2
.