Optimal design of microelectromechanical systems via reversed polynomial programming

In this paper we describe an optimal design method for micro-electro-mechanical systems (MEMS). We observe that many MEMS device designs with a variety of design objects and constraints can be reformulated as reversed polynomial programs, which can be globally solved by, e.g., branch-and-bound methods; in consequence the optimal MEMS design can be obtained directly from specifications. In this paper, design optimization of a crab-leg resonator is formulated as a reversed polynomial program.