Dielectric Charge Measurement in Capacitive Microwave Shunt Switches

The use of Microelectromechanical Systems as electronic switches in circuits for microwave frequency applications has grown considerably in the past decade. One phenomenon that limits the reliability of these switches is dielectric charging. Using a non-contact technique for measuring dielectric charging, the rate at which dielectric charging occurs can be measured and used to predict further charging. The prediction of dielectric charging can help optimize the controllable variables to minimize the extent of the phenomenon.