Micromachined gyros for automotive applications

Micro machined gyros are key elements in several automotive systems, thus enabling highly sophisticated applications like roll over detection and mitigation, navigation systems, electronic stability program (ESP) and other future vehicle stabilizing and dynamics control systems. New automotive systems are demanding higher accuracy, better signal to noise ratio, higher robustness and insensitivity against external perturbations, better system availability and reliability as well as easy application of the gyro. This paper is presenting the recent development, now the third generation of micromachined angular rate sensors at Robert Bosch GmbH. Mass production was started in spring 2005. These surface micromachined gyroscopes exhibit outstanding performance compared to similar designs