Dependence of finFET RF performance on fin width

This work analyzes the radio frequency (RF) performance of 60-nm gate length finFETs, for which the DC behavior exhibits reduced SCE. The RF analysis is carried out as a function of the gate length as well as the fin width (W
_fin
). Cut off frequencies (f
_t
, f
_max
) on the order of 100 GHz are reported for the first time. It is shown that W
_fin
has a large impact on those frequencies, due mainly to its effect on the access resistances. Nevertheless, it is also demonstrated that using optimized layout geometry, f
_max
values close to 170 GHz are to be expected