High Accuracy Micro-Displacement Sensor With Integrated Optics-based Detection Means

We present a high-precision monolithic glass micro-displacement sensor suitable for harsh or sensitive environment in general and electromagnetic radiation environment in particular. Our displacement sensor is made out of a single piece of glass through a two-steps process based on femtosecond laser illumination followed by chemical etching. This process is used to create for the first time integrated waveguided-optics and mechanical flexures within a three-dimensional glass body.