Three dimensional silicon integration using fine pitch interconnection, silicon processing and silicon carrier packaging technology

System-on-chip (SOC) and system-on-package (SOP) technologies each have advantages depending on application needs. As system architects and designers leverage ever-increasing CMOS technology densities, a range of two and three dimensional silicon integration technologies are emerging which likely support next generation high-volume electronic applications and may serve high-performance computing applications. This paper discusses a few emerging technologies which offer opportunities for circuit integration on-chip as well as on-package using fine pitch interconnection, silicon wafer processing and silicon carrier packaging technology. Advanced silicon carrier package technology with fine pitch (50/spl mu/m) interconnection is described. This silicon carrier package contains silicon through-vias and offers >16/spl times/ increase over standard chip I/O, a 20/spl times/ to 100/spl times/ increase in wiring density over traditional organic and ceramic packaging, and allows for integrated high performance passives. Silicon carrier technology supports lithographic scaling and provides a basis for known good die (KGD) wafer testing. It may be considered for use in a number of applications including optoelectronic (OE) transceivers and mini-multi-chip modules (MMCM) which integrate heterogeneous dies forming a single "virtual chip".