A Hardware Platform for Tuning of MEMS Devices Using Closed-Loop Frequency Response

We report on the development of a hardware platform for integrated tuning and closed-loop operation of MEMS gyroscopes. The platform was developed and tested for the second generation JPL/Boeing post-resonator MEMS gyroscope. The control of this device is implemented through a digital design on a field programmable gate array (FPGA). A software interface allows the user to configure, calibrate, and tune the bias voltages on the microgyro. The interface easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip