Multilayer nanogranular thin films as the materials for magnetic microinductors

Some results concerning the magnetic, electrical and microstructural properties of multilayer [FeCoBN/Si/sub 3/N/sub 4/]xn films in view of their utilization for manufacturing thin film magnetic microinductors, are presented. A comparison between the physical properties of FeCoBN and [FeCoBN/Si/sub 3/N/sub 4/]xn films is also reported The [FeCoBN/Si/sub 3/N/sub 4/]xn thin films with the thickness of the FeCoBN layers varied from 10 to 30 nm, exhibit good soft magnetic characteristics and high values for electrical resistivity such as Ms of 172 - 185 emu/g, Hc of 4 - 18 Oe and /spl rho/ of 820 - 480 /spl mu//spl Omega/-cm, respectively. These physical properties of the samples are discussed in relation with the microstructure of the multilayer system.