Sheet resistance measurement of thin metallic films and stripes at both 130 GHz and DC

This paper describes a technique for measuring the sheet resistance of thin metallic films at both 130 GHz and dc (0 Hz). The high-frequency measurements were made using dielectric waveguides, and the conventional four-point probe was used for the lower frequency. The two values of the sheet resistance for each sample were then compared. The technique has also been used to measure the sheet resistance of thin metallic films, which had been patterned to form a set of parallel stripes. From results obtained for stripes, values were evaluated of the sheet resistance for continuous films, which were less than 1 /spl Omega//square, thus extending the range of current measurement techniques.