Measurement and calculation of laser beam spot distortion caused by dynamic deformation of scanning mirror

We report the measurement and calculation results of a laser beam spot distortion caused by dynamic deformation of a MEMS scanning mirror. The laser beam spot distortion is measured by using the CCD camera located on focal point when an emission timing of the laser beam is synchronized with a motion of the scanning mirror. The calculated distortion is simulated by using the Fresnel-Kirchhoff diffraction formula. A dynamic deformation of the mirror is calculated by FEM. Their results have showed good agreement. Therefore we have proved our calculation method available