Thermally actuated micro scanner for barcode reader applications

This paper presents a low-cost 1D thermally actuated silicon micro scanner developed for our industrial partner. It was designed and optimised for mass production. With a really simple and standard fabrication process we obtained a high yield (> 95%) and good reproducibility of the scanner characteristics: low resonance frequency, good shock resistance, low power consumption, easy control, large mechanical sweep angle and a flat reflective surface