Dynamics analysis of microactuator with PZT drivers based on inertia-friction driving principle

Using piezoelectric ceramics as micro driving elements, based on the inertia-friction driving principle, a ball base microactuator is designed in this paper. It has centimeter scale's rotate displacements micro/nanometer scale's rotate positioning precision and three degrees of freedom. It detailed analyzes the discharge of PZT and its influence on the signal waveform generated by hard circuits. Especially, it divides the inherent discharge time of PZT into three small stages to analyze the kinematics and dynamics characteristics of the metal ball on each small stage. Kinematics and dynamics mathematical model of the metal ball on each small stage are set up. An impact force model acts on the metal ball is set up based on the momentum law. A back rotation model of the ball also set up in this paper. Experimentations prove the mathematical model of back rotation is reasonable in some degree.