MEMS circuit breakers for integrated shipboard power system

This paper discusses the feasibility of advanced MEMS for shipboard applications. We report on the design and fabrication of MEMS circuit breakers for shipboard power distribution systems. We developed an M/spl times/N array of electromagnetically actuated MEMS switches to handle high power. The distribution system considered in this research is rated at 400 V and 40 A DC, and it can be extended to AC systems.