Scalable microbeam flowsensors with electronic readout

In this paper, we present a scalable microchannel-embedded cantilever flowsensor with electronic readout. The scalable nature of the sensor addresses the need to realize arrays of flowsensors to characterize localized flow patterns. The electronic readout addresses the need to integrate flowsensors in microfluidic channels for closed-loop flow control. The in-channel nature of the flowsensor provides a wide choice for the cap material (e.g., PDMS, glass, silicon, etc.) enabling division of labor between integrated circuit (IC) and microfluidic foundries. This also holds promise for large-scale integrated microfluidic systems. The cantilever beam is placed inside a microfluidic channel in such a way that it utilizes drag forces to cause a flow-induced stress underneath the beam anchor. A Wheatstone bridge of piezoresistors placed directly under the anchor converts the flow-induced stress into a differential output voltage. We present an analytical model and 3-D simulations for the proposed flowsensor. Flowsensors fabricated by standard photolithography were tested to experimentally verify the validity of the model and simulation results. A flow sensitivity (unamplified) of 0.5 ppm/(/spl mu/L/s) was measured with first generation devices with water flow from 10 /spl mu/L/min to 100 /spl mu/L/min. Through experimental results, it is also shown that scaling down the size of the flowsensor results in higher sensitivity. We present a prediction on the noise-floor of flow measurement based on the results obtained using these prototype flowsensors.