Plasma immersion ion implantation and deposition

A new PIII&D system is installed to study surface modification of metals, polymer and ceramic at the University of Ulsan, Korea. It is combined with in-situ heating up to 400/spl deg/C for deeper modified later (/spl sim/several hundred microns) and in-situ sputter deposition system with 3 targets. In this paper, we introduce its specification, configuration and the first preliminary results of nitrogen-PIII&D with SKD61 tool steels. In addition, we propose a field of co-work with Russian scientists.