Fabrication of a novel 3D 8/spl times/8 electrode array for artificial retina

This paper presents a novel 3D 8/spl times/8 multi-electrode array for artificial retina application. Each electrode features a triangular pyramidal structure that composed of one (111) plane and two vertical planes. The coneangle between the (111) plane and the vertical plane is 19.5/spl deg/. The sharp triangular pyramidal structure makes the minimal invasive penetration for the inner limiting membrane. The characteristic measurement of impedance magnitude and the phase shift of a single electrode are 1.19 M/spl Omega/ and 80.8/spl deg/ at 1 kHz, respectively.