The AFM tweezers: integration of a tweezers function with an AFM probe

A prototype of AFM (atomic force microscope) tweezers is presented. In order to combine the function of nano objects manipulation with AFM observation, we have developed a tweezers-type AFM probe device using micromachining technology. The device has two thin wedge-type arms shaped by anisotropic etching and local oxidation of silicon techniques; one arm plays the role of an AFM probe, and another plays that of a manipulation probe in cooperation with monolithically fabricated microactuators. We have successfully demonstrated the function of picking up nanoparticles by the developed AFM tweezers.