Electromagnetically actuated ball valve micropumps

We present two types of oscillating diaphragm micropumps configured with passive ball valves and using electromagnetic actuation. One type is made out of poly(methyl methacrylate) (PMMA), while the other one is made out of borosilicate glass. Both were produced using the powder blasting microfabrication method. The pumping resonant frequency was measured to be within the range of 20-30 Hz for both prototypes. At resonance, a maximum backpressure of 280 mbar and a maximum water flow rate of about 5 ml/min were obtained. The experimental results can be well described by a simple hydrodynamic model of the system.