Integration of high-Q BAW resonators and filters above IC

A double-lattice BAW filter with balanced input and output is designed with a center frequency of 2.14GHz. The filter is integrated directly above a 0.25/spl mu/m BiCMOS RF IC. Insertion loss of -3dB and out-of-band rejection better than -50dB are achieved. An integrated LNA comprising two broadband amplifiers and one BAW filter is also presented.