Study of factors limiting ESD diode performance in 90nm CMOS technologies and beyond

The on-resistance and failure current of electrostatic discharge (ESD) protection diodes in 90 nm and 65 nm bulk CMOS technologies is determined largely by the resistance and failure of metal lines, contacts or vias. With design optimization, P/sup +//N-well ESD diodes fabricated in a 90 nm bulk CMOS technology achieved a forward voltage drop of 1.66 V at 2 A, an on-resistance of 0.27 /spl Omega/ and a 100 ns TLP failure current greater than 5 A with a junction capacitance of only 125 fF, area of 330 /spl mu/m/sup 2/ and anode perimeter of 300 /spl mu/m.