IrSi Schottky-barrier infrared image sensor

An iridium silicide Schottky-barrier (IrSi SB) infrared image sensor with 512×512 pixels has been developed. The Charge Sweep Device architecture is applied to the device. The detector is an IrSi/p-Si SB diode, which has a cutoff wavelength of 7.3µm. The device is cooled to 62K for reducing thermally generated dark current. The device operates at the NTSC frame rate (30 frames/s). The examples of thermal imaging with this device are demonstrated.