Deep-depletion CCDs with improved UV sensitivity

This paper presents results obtained on backside-illuminated deep-depletion CCDs developed for ultra-violet (UV) and X-ray imaging. Through appropriate backside treatments the CCD structure was optimized for high quantum efficiency in the UV-region of the spectrum. At 1216Å, where the photon absorption length is very short (∼70Å), a maximum quantum efficiency of 16-20% was obtained on the best devices as compared with less than 1% efficiency for devices without backside treatment.