Monolithic integration of a metal—semiconductor—metal photodiode and a GaAs preamplifier

A metal-semiconductor-metal (MSM) photodiode and a preamplifier have been monolithically integrated on a GaAs substrate by a very simple fabrication process. Measurements have shown that the constituent MSM photodiode has a sensitivity of 2.2 A/W and a -3-dB cutoff frequency of as high as 1 GHz. The present photodiode has been found to realize an extremely high photosensitivity of the monolithically integrated circuit, 26 mV/µW.