RF triode-sputtered mercury cadmium telluride thin films

Experimental results presented for (Hg
0.75
Cd
0.25
)Te film deposited on silicon substrates indicate that large-area photodiode detector arrays on electronically active substrates can be made by RF triode-sputtering large-area (25.5-cm
²
) pressed-powder targets with mercury ions. Films with the same composition as the target were obtained using either a homogenized powder mixture of CdTe and HgTe or a powder ground from a polycrystalline (Hg
0.75
Cd
0.25
)Te ingot. X-ray diffraction measurements shows that as-deposited polycrystalline films can have 100-percent