An integrated CMOS microsystem for NMR applications

A monolithic CMOS microsystem for nuclear magnetic resonance applications has been designed and tested. It includes two planar microcoils and a complete readout electronics with a single 3.3 V supply. It measures static fields around 1 T with a field resolution better than 1 ppm/√Hz. The probe can also be used for NMR spectroscopy with a spectral resolution of 15 Hz. The resolution is mainly limited by the silicon magnetic susceptibility.