An absolute air pressure smart sensor family with 2 dimensional calibration

We present a monolithic pressure transducer family with on-chip pressure sensor, readout, linearization, and temperature compensation reaching an 1% accuracy after calibration. Temperature compensation and linearization are realized by two dimensional pwl interpolation using ΣΔ-modulators. This accuracy requires only a few calibration points for full pressure and temperature range. A prototype sensor system has been fabricated in an 1.2µm CMOS-process with surface mircomachining extension and occupies a chip area of 11.8mm
²
. The power consumption of this sensor system is ca. 6mW.