3DAP analysis of FeCo electrodeposited soft magnetic films with high B/sub s/

In this paper soft magnetic FeCo films were electrodeposited in two different electroplating baths with pulse current, one contained NaCl, the other contained KCl as electroconductivity investor. This however, have slightly lower B/sub s/ than that of the sputtered film. One of the reasons for the lower B/sub s/ is thought to be the effect of impurities. In order to clarify the effect of impurities of B/sub s/ we have investigated the microstructures and the local chemistries of the FeCo films. Magnetic properties were measured by a VSM and a SQUID magnetometer and the microstructures were characterized by a transmission electron microscopy (TEM) and a three-dimensional atom probe (3DAP). Results show that low B/sub s/ is attributed to the low magnetization in the grain boundaries.