A monolithic 1 × 10 array of silicon avalanche photodiodes

A monolithic 1 × 10 array of silicon avalanche photodiodes (Si-APD's) was fabricated. The deviations of breakdown voltages and current gains from mean values in an array were less than ±0.3 and ±2 percent, respectively. The optical interelemental coupling between the adjacent two elements in an array was estimated to be -57 dB.