Storage experiments with ultra-high density MNOS capacitors

Experiments have been performed to determine the feasibility of achieving storage densities greater than 10
⁷
/in
²
using MNOS capacitors. Good signal-to-noise ratios have been achieved in arrays of air-isolated storage sites 0.09 mil × 0.15 mil using a voltage ramp for depletion sensing and avalanche breakdown to avoid deep depletion during writing.