A novel CBCM method free from charge injection induced errors: investigation into the impact of floating dummy-fills on interconnect capacitance

Starting from CIEF (charge injection induced errors) CBCM (charge-based capacitance measurement), a novel CBCM method free from the errors induced by charge-injection is developed. This is used for the first time to investigate the impact of floating dummy-fills on interconnect capacitance, in practice. The impact of floating dummy-fills is confirmed to play an important role on successful circuit design. Besides, a guideline to optimize the chip performance and minimize the crosstalk by dummy pattern design is also proposed in this paper.