Ultrawide-band tunable true-time delay lines using ferroelectric varactors

This paper reports on compact tunable true-time delay lines based on ferroelectric (Ba/sub 0.25/Sr/sub 0.75/TiO/sub 3/) varactors integrated on high-resistivity silicon. The delay lines are based on lumped elements, physically implemented as synthetic coplanar-strip lines. An approximate analytical design procedure, exactly valid for /spl omega//spl rarr/0, is proposed. The physical size of the fabricated delay lines is 2.0/spl times/0.33 mm/sup 2/, including bias pads. Measurements are performed from room temperature (RT) down to 80 K. The measurements reveal ultrawide-band characteristics for both group delay and insertion loss. At RT, the absolute group delay is /spl tau//sub /spl delta//(RT, 0 V) /spl ap/70 ps with tunability of 20% under 20-V dc bias, the insertion less than 3.5 dB, and the reflection loss better than 12 dB below 20 GHz. At 145 K, the absolute group delay is increased to /spl tau//sub /spl delta//(145 K, 0 V) /spl ap/100 ps with a tunability of 50% under 20-V applied bias. At 7 GHz, the insertion loss is 3 dB, resulting in figures-of-merit of 0.03 dB/ps and 50 ps/mm. The leakage current at RT is less than 0.1 /spl mu/A.